\documentclass[tikz, border=2pt]{standalone}
\usepackage[utf8]{inputenc}
\usepackage{tikz}
\usetikzlibrary{positioning}
\begin{document}
\tikzstyle{fullemptynode} = [rectangle, draw=black!0, minimum size=5mm]
\tikzstyle{emptynode} = [rectangle, draw=black!70, thick, minimum size = 5mm]
\tikzstyle{fillnode} = [rectangle, draw=black!70, fill=blue!30, thick, minimum size=5mm]
\begin{tikzpicture}[font={\small}]
\node[fillnode] (main node) {No structure};
\node[emptynode] (first node) at (-3,-2) {SE} edge [-] (main node);
\node[fillnode] (second node) at (-1,-2) {RQ} edge [-] (main node);
\node[emptynode] (fourth node) at (1, -2) {Lin} edge [-] (main node);
\node[emptynode] (fifth node) at (3, -2) {Per} edge [-] (main node);
\node[fillnode] (1third node) at (-1,-4) {Per $+$ RQ} edge [-] (second node);
\node[fullemptynode] (1second node) at (-3,-4) {...} edge [-] (second node);
\node[emptynode] (1first node) at (-5,-4) {SE $+$ RQ} edge [-] (second node);
\node[fullemptynode] (1fourth node) at (1, -4) {...} edge [-] (second node);
\node[emptynode] (1fifth node) at (3, -4) {Per $\times$ RQ} edge [-] (second node);
\node[emptynode] (2first node) at (-5, -6) {SE $+$ Per $+$ RQ} edge [-] (1third node);
\node[fullemptynode] (2second node) at (-2, -6) {...} edge [-] (1third node);
\node[fillnode] (2third node) at (1, -6) {SE $\times$ (Per $+$ RQ)} edge [-] (1third node);
\node[fullemptynode] (2fourth node) at(4, -6) {...} edge [-] (1third node);
\node[fullemptynode] (3first node) at (-1,-8) {...} edge [-] (2third node);
\node[fullemptynode] (3second node) at (1,-8) {...} edge [-] (2third node);
\node[fullemptynode] (3third node) at (3,-8) {...} edge [-] (2third node);
\end{tikzpicture}
\end{document}